Journal: Micromachines

Article Title: Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

doi: 10.3390/mi12020141

Figure Lengend Snippet: The single-finger SAW devices structure with trapezoid shape electrode, ( a ) 2D-FEM model, ( b ) cross-sectional scanning electron microscopy image of the actual device.

Article Snippet: One can clearly see that the simulated result agrees well with measurement based on the PDE-based 2D-FEM model using COMSOL code.

Techniques: Electron Microscopy

Journal: Micromachines

Article Title: Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

doi: 10.3390/mi12020141

Figure Lengend Snippet: Regular SAW resonator on Al/42° YX LT structure, ( a ) partial differential equations (PDE)-based 2D-FEM model, ( b ) Y 11 curves for simulation and experiment, ( c ) the mode shape at the resonant frequency, ( d ) displacement field distribution versus normalized depth for the SH-leaky SAW at the resonant frequency.

Article Snippet: One can clearly see that the simulated result agrees well with measurement based on the PDE-based 2D-FEM model using COMSOL code.

Techniques:

Journal: Micromachines

Article Title: Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

doi: 10.3390/mi12020141

Figure Lengend Snippet: IHPSAW resonator on Cu/ 42° YX LT/SiO 2 /Si structure, ( a ) PDE-based 2D-FEM model, ( b ) Y 11 curves for simulation and experiment, ( c ) the mode shape at the resonant frequency, ( d ) displacement field distribution versus normalized depth for the SH-leaky SAW at the resonant frequency.

Article Snippet: One can clearly see that the simulated result agrees well with measurement based on the PDE-based 2D-FEM model using COMSOL code.

Techniques:

Journal: Micromachines

Article Title: Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

doi: 10.3390/mi12020141

Figure Lengend Snippet: Temperature-compensated SAW (TC-SAW) resonator on SiO 2 /IDT/5° YX-LN structure, ( a ) PDE-based 2D-FEM model, ( b ) Y 11 curves for simulation and experiment, ( c ) the mode shape at the resonant frequency, ( d ) displacement field distribution versus normalized depth for the SH-leaky SAW at the resonant frequency.

Article Snippet: One can clearly see that the simulated result agrees well with measurement based on the PDE-based 2D-FEM model using COMSOL code.

Techniques:

Journal: Micromachines

Article Title: Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

doi: 10.3390/mi12020141

Figure Lengend Snippet: The compared key performance parameters of SAW resonator for simulation and experiment, S donates the simulation results calculated by the proposed PDE-based 2D FEM model, M donates the measurement experimental results.

Article Snippet: One can clearly see that the simulated result agrees well with measurement based on the PDE-based 2D-FEM model using COMSOL code.

Techniques: